Miniaturized and ruggedized wafer level MEMs force sensors

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United States of America Patent

PATENT NO 9902611
SERIAL NO

15111044

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Abstract

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Described herein is a miniaturized and ruggedized wafer level MEMS force sensor composed of a base and a cap. The sensor employs multiple flexible membranes, a mechanical overload stop, a retaining wall, and piezoresistive strain gauges.

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Patent Owner(s)

Patent OwnerAddress
NEXTINPUT INC980 LINDA VISTA AVENUE MOUNTAIN VIEW CA 94043

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brosh, Amnon Santa Monica, US 20 567
Diestelhorst, Ryan San Jose, US 28 309
Nasiri, Steven Los Altos Hills, US 8 253

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