Method for forming a microelectromechanical device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9902612
SERIAL NO

15629834

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method for forming a microelectromechanical device may provide forming a first layer at least one of in or over a semiconductor carrier; forming a second layer at least one of in or over at least a central region of the first layer, such that a peripheral region of the first layer is at least partially free of the second layer; removing material under at least a central region of the second layer to release at least one of the central region of the second layer or a central region of the first layer; and/or removing material under at least the peripheral region of the first layer to such that the second layer is supported by the semiconductor carrier via the first layer.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barzen, Stefan Munich, DE 50 488
Dehe, Alfons Reutlingen, DE 163 2293
Friza, Wolfgang Villach, AT 24 206
Klein, Wolfgang Zorneding, DE 74 667
Krumbein, Ulrich Rosenheim, DE 41 290

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 27, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 27, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00