Coarse motion and fine motion integrated reticle stage driven by planar motor

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United States of America Patent

PATENT NO 9904183
SERIAL NO

15307752

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Abstract

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A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.

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Patent Owner(s)

  • TSINGHUA UNIVERSITY;BEIJING U-PRECISION TECH CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Rong Beijing, CN 30 45
Hu, Jinchun Beijing, CN 28 43
Liu, Zhao Beijing, CN 57 402
Mu, Haihua Beijing, CN 17 30
Qin, Huichao Beijing, CN 5 12
Tian, Li Beijing, CN 134 93
Yang, Kaiming Beijing, CN 29 52
Ye, Weinan Beijing, CN 8 13
Yin, Wensheng Beijing, CN 25 55
Zhang, Jin Beijing, CN 351 1944
Zhang, Li Beijing, CN 2449 32460
Zhang, Ming Beijing, CN 830 6666
Zhao, Yanpo Beijing, CN 4 11
Zhi, Fan Beijing, CN 3 4
Zhu, Yu Beijing, CN 359 3318

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