Imprint template and methods thereof

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United States of America Patent

PATENT NO 9905259
SERIAL NO

14699412

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided herein is a method, including forming a first template including a first pattern, wherein forming the first template includes self-assembly of diblock copolymers guided by an initial pattern; forming a second template including a second pattern, wherein the second pattern corresponds to a servo pattern; and forming a master template from the first template, wherein the master template includes one or more portions of the first pattern combined with the second pattern.

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Patent Owner(s)

  • SEAGATE TECHNOLOGY LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chauhan, Sundeep Fremont, US 19 84
Kantorov, Alexander Dublin, US 3 6
Kuo, David Palo Alto, US 50 462
Lee, Kim Yang Fremont, US 54 480
Marinus, Van de Veerdonk Rene Johannes Pleasanton, US 3 24
Vikaramaditya, Barmeshwar Eden Prairie, US 1 0

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