Stage apparatus with braking system for lens, beam, or vibration compensation
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United States of America Patent
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Feb 27, 2018
Issued Date -
N/A
app pub date -
Mar 21, 2016
filing date -
Mar 26, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A stage apparatus is provided including a base, a table that is movable relative to the base, a drive mechanism that moves the table, a pressing mechanism that presses the table, a position detection device that detects a location of the table, and a control device that controls the pressing mechanism. The table is moved in a predetermined moving direction relative to the base by the drive mechanism. The table is pressed by the pressing mechanism in a direction different from the moving direction. The control device, which is connected to the position detection device, controls the pressing mechanism to press the table at a stop position of the table. The control device controls the pressing mechanism based on locations of the table before and after being pressed, a correction amount indicating a difference between the locations, and a target location of the table.
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Cited Art Landscape
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