Soft landing nanolaminates for advanced patterning

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9905423
SERIAL NO

15177108

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Methods for depositing nanolaminate protective layers over a core layer to enable deposition of high quality conformal films over the core layer for use in advanced multiple patterning schemes are provided. In certain embodiments, the methods involve depositing a thin silicon oxide or titanium oxide film using plasma-based atomic layer deposition techniques with a low high frequency radio frequency (HFRF) plasma power, followed by depositing a conformal titanium oxide film or spacer with a high HFRF plasma power.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
NOVELLUS SYSTEMS INCSAN JOSE CA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dixit, Girish A San Jose, US 56 1629
LaVoie, Adrien Newberg, US 181 14608
Pasquale, Frank L Beaverton, US 24 1613
Shamma, Nader Cupertino, US 24 1201
Swaminathan, Shankar Beaverton, US 105 10075

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 27, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 27, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00