Electrostatic chuck

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9905449
SERIAL NO

15452330

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface, a second major surface, and a through-hole; a metallic base plate which has a gas introduction path that communicates with the through-hole; and a bonding layer which is provided between the ceramic dielectric substrate and the base plate and includes a resin material. The bonding layer has a space which is provided between an opening of the through-hole in the second major surface and the gas introduction path and is larger than the opening in a horizontal direction, and a first area in which an end face of the bonding layer on a side of the space intersects with the second major surface being recessed from the opening further than a second area of the end face which is different from the first area.

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Patent Owner(s)

Patent OwnerAddress
TOTO LTD1-1 NAKASHIMA 2-CHOME KOKURAKITA-KU KITAKYUSHU-SHI FUKUOKA 8028601

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anada, Kazuki Fukuoka-Ken, JP 12 86
Koga, Tatsuya Fukuoka-Ken, JP 20 47
Matsui, Hiroki Fukuoka-Ken, JP 94 500
Yamaguchi, Kosuke Fukuoka-Ken, JP 23 244

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