Process for making semiconductor dies, chips, and wafers using non-contact measurements obtained from DOEs of NCEM-enabled fill cells on test wafers that include multiple means/steps for enabling NC detection of V0 via opens

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United States of America Patent

PATENT NO 9905487
SERIAL NO

15278344

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Improved processes for manufacturing semiconductor wafers, chips, or dies utilize in-line data obtained from non-contact electrical measurements (“NCEM”) of fill cells that contain structures configured to target/expose a variety of open-circuit, short-circuit, leakage, and/or excessive resistance failure modes. Such processes include evaluating one or more Designs of Experiments (“DOEs”), each comprised of multiple NCEM-enabled fill cells, in at least two variants, targeted to the same failure mode. Such DOEs include multiple means/steps for enabling non-contact (NC) detection of V0 via opens.

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PDF SOLUTIONS INC2858 DE LA CRUZ BOULEVARD SANTA CLARA CA 95050

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brozek, Tomasz Morgan Hill, US 87 297
Cheng, Jeremy San Jose, US 119 311
Ciplickas, Dennis San Jose, US 89 381
Comensoli, Simone Darfo Boario Terme, IT 80 105
De, Indranil Mountain View, US 120 1081
Doong, Kelvin Hsinchu, TW 81 186
Eisenmann, Hans Tutzing, DE 86 154
Fiscus, Timothy New Galilee, US 81 114
Haigh, Jonathan Pittsburgh, US 98 229
Hess, Christopher Belmont, US 125 1363
Kibarian, John Los Altos Hills, US 89 539
Lam, Stephen Freemont, US 127 2094
Lee, Sherry Monte Sereno, US 88 398
Liao, Marci Santa Clara, US 80 105
Lin, Sheng-Che Hsinchu, TW 86 105
Matsuhashi, Hideki Santa Clara, US 84 142
Michaels, Kimon Monte Sereno, US 88 280
O'Sullivan, Conor Campbell, US 93 266
Rauscher, Markus Munich, DE 90 914
Rovner, Vyacheslav Pittsburgh, US 80 105
Strojwas, Andrzej Pittsburgh, US 81 124
Strojwas, Marcin Pittsburgh, US 80 105
Taylor, Carl Pittsburgh, US 90 1069
Vallishayee, Rakesh Dublin, US 83 357
Weiland, Larg Hollister, US 81 105
Yokoyama, Nobuharu Tokyo, JP 80 105

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