Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, GATECNT-short-configured, and metal-short-configured, NCEM-enabled fill cells

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United States of America Patent

PATENT NO 9905553
SERIAL NO

15390862

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Abstract

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An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one GATECNT-short-related failure mode, and one metal-short-related failure mode.

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Patent Owner(s)

Patent OwnerAddress
PDF SOLUTIONS INC2858 DE LA CRUZ BOULEVARD SANTA CLARA CA 95050

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brozek, Tomasz Morgan Hill, US 87 297
Cheng, Jeremy San Jose, US 119 311
Ciplickas, Dennis San Jose, US 89 381
Comensoli, Simone Darfo Boario Terme, IT 80 105
De, Indranil Mountain View, US 120 1081
Doong, Kelvin Hsinchu, TW 81 186
Eisenmann, Hans Tutzing, DE 86 154
Fiscus, Timothy New Galilee, US 81 114
Haigh, Jonathan Pittsburgh, US 98 229
Hess, Christopher Belmont, US 125 1363
Kibarian, John Los Altos Hills, US 89 539
Lam, Stephen Freemont, US 127 2094
Lee, Sherry Monte Sereno, US 88 398
Liao, Marci Santa Clara, US 80 105
Lin, Sheng-Che Hsinchu, TW 86 105
Matsuhashi, Hideki Santa Clara, US 84 142
Michaels, Kimon Monte Sereno, US 88 280
O'Sullivan, Conor Campbell, US 93 266
Rauscher, Markus Munich, DE 90 914
Rovner, Vyacheslav Pittsburgh, US 80 105
Strojwas, Andrzej Pittsburgh, US 81 124
Strojwas, Marcin Pittsburgh, US 80 105
Taylor, Carl Pittsburgh, US 90 1069
Vallishayee, Rakesh Dublin, US 83 357
Weiland, Larg Hollister, US 81 105
Yokoyama, Nobuharu Tokyo, JP 80 105

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