Optical spectrometer with matched étendue

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United States of America Patent

PATENT NO 9909992
SERIAL NO

15119055

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Abstract

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The present disclosure relates to systems, methods, and sensors configured to characterize a radiation beam. At least one embodiment relates to an optical system. The optical system includes an optical radiation guiding system. The optical radiation guiding system includes a collimator configured to collimate the radiation beam into a collimated radiation beam. The optical radiation guiding system also includes a beam shaper configured to distribute power of the collimated radiation beam over a discrete number of line shaped fields. A spectrum of the collimated radiation beam entering the beam shaper is delivered to each of the discrete number of line shaped fields. The optical system further includes a spectrometer chip. The spectrometer chip is configured to process the spectrum of the collimated radiation beam in each of the discrete number of line shaped fields coming from the beam shaper.

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Patent Owner(s)

Patent OwnerAddress
IMEC VZWKAPELDREEF 75 LEUVEN 3001

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Peumans, Peter Herfelingen, BE 60 1157
Van, Dorpe Pol Spalbeek, BE 26 82

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