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Abstract

A device for the interferometric measuring of an object, including a source to generate a source beam, a beam splitting device to split the source beam into a measuring beam and a reference beam, an optic interference device and a first detector, which cooperate such that the measuring beam reflected by the object at least partially is at least partially interfered as the receiver beam and the reference beam on a detector area of the first detector. The beam splitting device splits the source beam into a measuring beam, a first partial reference beam, and at least one second partial reference beam. There is at least one second detector embodied such that the first receiver beam is interfered with the first partial reference beam on a detection area of the first detector and the second partial receiver beam with a second partial reference beam on a detection area of the second detector, each with the formation of an optic interference. An assessment unit assesses the measuring signals of the detectors according to the principle of the reception diversity.

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First Claim