Patterning device manipulating system and lithographic apparatuses
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United States of America Patent
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Mar 6, 2018
Issued Date -
N/A
app pub date -
Sep 20, 2013
filing date -
Oct 23, 2012
priority date (Note) -
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Abstract
A system (300) for supporting an exchangeable object (302) can include a movable structure (304) and an object holder (306) configured to be movable relative to the movable structure. The object holder can be configured to hold the exchangeable object. The system can also include a first actuator assembly (308) and second actuator assembly (316). The first actuator assembly can be configured to apply a force to the object holder to translate the exchangeable object generally along a plane. The second actuator assembly can be configured to apply a bending moment to the object holder. The exchangeable object can be a patterning device of a lithographic apparatus.
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