Ion bombardment apparatus and method for cleaning of surface of base material using the same

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United States of America Patent

PATENT NO 9911576
APP PUB NO 20130133690A1
SERIAL NO

13666038

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Abstract

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In an ion bombardment apparatus of the present invention, a heating type thermal electron emission electrode formed by a filament is placed on one inner surface of a vacuum chamber, an anode for receiving a thermal electron from the thermal electron emission electrode is placed on another inner surface of the vacuum chamber, and a base material is placed between the thermal electron emission electrode and the anode. Further, the ion bombardment apparatus has a discharge power supply for generating a glow discharge upon application of a potential difference between the thermal electron emission electrode and the anode, a heating power supply for heating the thermal electron emission electrode so as to emit the thermal electron, and a bias power supply for applying negative pulse-shaped bias potential with respect to the vacuum chamber to the base material.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL LTD )2-4 WAKINOHAMA-KAIGANDORI 2-CHOME CHUO-KU KOBE-SHI HYOGO 651-8585

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cremer, Rainer Monschau, DE 3 19
Goto, Naoyuki Takasago, JP 70 1109
Hirota, Satoshi Takasago, JP 19 39
Nomura, Homare Takasago, JP 5 24

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