Methods and apparatus for liquid chemical delivery

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United States of America Patent

PATENT NO 9914632
APP PUB NO 20160052772A1
SERIAL NO

14522142

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Abstract

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Methods and apparatus for delivering precursor materials derived from liquid chemicals to a process chamber are provided herein. In some embodiments, a liquid chemical delivery apparatus includes: a body having an inner volume to hold a liquid chemical, an inlet to receive a carrier gas into the inner volume, and an outlet to flow the carrier gas from the inner volume, wherein a bottom of the inner volume includes a reduced volume portion; and a level sensor configured to detect a level of the liquid chemical in the reduced volume portion.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Durukan, Ilker Sunnyvale, US 10 59
Ma, Paul F Santa Clara, US 66 2805
Rasheed, Muhammad M San Jose, US 70 1614

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