Substrate treating apparatus, drive assembly, and drive member controlling method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9915261
SERIAL NO

14527936

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Provided is a substrate treating apparatus. The substrate treating apparatus includes: a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process o the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly includes: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SEMES CO LTD77 4SANDAN 5-GIL JIKSAN-EUP SEOBUK-GU CHEONAN-SI CHUNGCHEONGNAM-DO 31040

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Jin Ho Cheonan-si, KR 88 444
Yoo, Ju Mi Cheonan-si, KR 1 1

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 13, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 13, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00