Total internal reflection light illumination device
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United States of America Patent
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Mar 13, 2018
Issued Date -
N/A
app pub date -
Oct 20, 2014
filing date -
Oct 22, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A total internal reflection light illumination apparatus includes a light source providing illumination light L1, a spatial light modulator inputting the illumination light L1 and converging and outputting the illumination light L1 by presenting a lens pattern, an objective lens illuminating an object substrate with illumination light L2 converged and output by the spatial light modulator, and a calculation unit providing, to the spatial light modulator, the lens pattern corresponding to at least one of a desired polarization state, desired penetration length, desired shape, and desired light intensity of the evanescent light L3. The lens pattern converges the illumination light L2 on a pupil plane of the objective lens.
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