Method of operating a charged particle microscope and charged particle microscope operating according to such method

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United States of America Patent

PATENT NO 9916964
SERIAL NO

15246421

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Abstract

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A method of operating a charged particle microscope comprises: providing settings of a focus, an x-stigmator and an y-stigmator of the charged particle microscope; and then repeatedly performing adjusting the charged particle microscope to the settings, recording an image of an object using the settings, determining a sharpness measure from the recorded image, and changing at least one of the settings of the focus, the x-stigmator and the y-stigmator based on the sharpness measure until a stop criterion is fulfilled. Herein, the determining of the sharpness measure comprises: determining an orientation of an intensity gradient at each of a plurality of locations within one of the recorded image and a processed image generated by processing the recorded image, and determining the sharpness measure based on the plurality of determined orientations.

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Patent Owner(s)

  • CARL ZEISS MICROSCOPY GMBH;CARL ZEISS MICROSCOPY LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Diemer, Simon Roettingen, DE 9 14
Heindl, Emanuel Aalen, DE 2 2
Roddom, David Linton, GB 2 2
Schulz, Janina Munich, DE 2 2

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