Display element manufacturing method and manufacturing apparatus

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United States of America Patent

PATENT NO 9917023
SERIAL NO

14736567

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.

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Patent Owner(s)

  • NIKON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamada, Tomohide Yokohama, JP 41 690
Nara, Kei Yokohama, JP 46 451

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