Resonant gyroscopes and methods of making and using the same
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United States of America Patent
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Mar 13, 2018
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app pub date -
Jun 15, 2015
filing date -
Jun 13, 2014
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Abstract
Certain implementations of the disclosed technology may include systems and methods for high-frequency resonant gyroscopes. In an example implementation, a resonator gyroscope assembly is provided. The resonator gyroscope assembly can include a square resonator body suspended adjacent to a substrate, a ground electrode attached to a side of the resonator body, a piezoelectric layer attached to a side of the ground electrode, a drive electrode in electrical communication with the piezoelectric layer, and configured to stimulate one or more vibration modes of the square resonator body; and a sense electrode in electrical communication with the piezoelectric layer, and configured to receive an output from the square or disk resonator responsive to stimulation of the one or more vibration modes.
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