Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof

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United States of America Patent

PATENT NO 9920077
SERIAL NO

15025198

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Halogen free amine substituted trisilylamine and tridisilylamine compounds and a method of their preparation via de-hydrogenative coupling between the corresponding unsubstituted trisilylamines and amines catalyzed by transition metal catalysts is described. This new approach is based on the catalytic dehydrocoupling of a Si—H and a N—H moiety to form an Si—N containing compound and hydrogen gas. The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The —Si—N containing products are halide free. Such compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si containing films.

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L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDEPARIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Girard, Jean-Marc Versailles, FR 86 660
Itov, Gennadiy Branchburg, US 13 123
Khandelwal, Manish Branchburg, US 24 145
Sanchez, Antonio Jersey City, US 25 190
Stephens, Matthew Damien Branchburg, US 9 10
Zhang, Peng Branchburg, US 338 2056

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