Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof

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United States of America Patent

PATENT NO 9920077
SERIAL NO

15025198

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Halogen free amine substituted trisilylamine and tridisilylamine compounds and a method of their preparation via de-hydrogenative coupling between the corresponding unsubstituted trisilylamines and amines catalyzed by transition metal catalysts is described. This new approach is based on the catalytic dehydrocoupling of a Si—H and a N—H moiety to form an Si—N containing compound and hydrogen gas. The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The —Si—N containing products are halide free. Such compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si containing films.

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Patent Owner(s)

  • L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Girard, Jean-Marc Versailles, FR 116 2655
Itov, Gennadiy Branchburg, US 28 1128
Khandelwal, Manish Branchburg, US 36 1167
Sanchez, Antonio Jersey City, US 45 1434
Stephens, Matthew Damien Branchburg, US 12 241
Zhang, Peng Branchburg, US 724 7552

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