Halogen free synthesis of aminosilanes by catalytic dehydrogenative coupling

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United States of America Patent

PATENT NO 9920078
SERIAL NO

15245559

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Compounds and method of preparation of Si—X and Ge—X compounds (X═N, P, As and Sb) via dehydrogenative coupling between the corresponding unsubstituted silanes and amines (including ammonia) or phosphines catalyzed by metallic catalysts is described. This new approach is based on the catalytic dehydrogenative coupling of a Si—H and a X—H moiety to form a Si—X containing compound and hydrogen gas (X═N, P, As and Sb). The process can be catalyzed by transition metal heterogenous catalysts such as Ru(0) on carbon, Pd(0) on MgO) as well as transition metal organometallic complexes that act as homogeneous catalysts. The —Si—X products produced by dehydrogenative coupling are inherently halogen free. Said compounds can be useful for the deposition of thin films by chemical vapor deposition or atomic layer deposition of Si-containing films.

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L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDEPARIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Itov, Gennadiy Flemington, US 13 123
Khandelwal, Manish Branchburg, US 24 145
Sanchez, Antonio Jersey City, US 25 190
Stephens, Matthew Damien Morristown, US 9 10
Zhang, Peng Montvale, US 338 2056

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