Flow rate range variable type flow rate control apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9921089
SERIAL NO

15171333

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1-P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • FUJIKIN INCORPORATED;TOKYO ELECTRON LIMITED;NATIONAL UNIVERSITY CORPORATION TOHUKU UNIVERSITY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dohi, Ryousuke Osaka, JP 103 1944
Hino, Shoichi Tokyo, JP 6 68
Hirata, Kaoru Osaka, JP 69 823
Hirose, Takashi Osaka, JP 99 1147
Ikeda, Nobukazu Osaka, JP 232 4020
Imai, Tomokazu Osaka, JP 8 78
Miura, Kazuyuki Miyagi, JP 24 325
Nagase, Masaaki Osaka, JP 84 985
Nishino, Kouji Osaka, JP 165 2277
Ohmi, Tadahiro Miyagi, JP 798 13100
Saito, Masahito Tokyo, JP 7 67
Shimazu, Tsuyoshi Miyagi, JP 8 158
Shinohara, Tsutomu Osaka, JP 141 868
Sugita, Katsuyuki Osaka, JP 54 342
Tanaka, Hisashi Osaka, JP 67 708
Yoshida, Toshihide Osaka, JP 30 269

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 20, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 20, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00