Scanning probe microscope and measurement range adjusting method for scanning probe microscope

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United States of America Patent

PATENT NO 9921241
SERIAL NO

15086560

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Abstract

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A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed.

description='In-line Formulae' end='lead'MW=(Smax−Smin)  Equation (1)description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'OV=(MW/2)+Smin  Equation (2)description='In-line Formulae' end='tail'

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Patent Owner(s)

  • HITACHI HIGH-TECH SCIENCE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shigeno, Masatsugu Tokyo, JP 28 138
Shikakura, Yoshiteru Tokyo, JP 12 38

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