Schedule making device, substrate processing apparatus, schedule making program, schedule making method, and substrate processing method
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United States of America Patent
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Mar 20, 2018
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N/A
app pub date -
Jul 25, 2013
filing date -
Sep 21, 2012
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Abstract
To provide a technique capable of making a schedule with good time efficiency in schedule making for the transport of substrates. A schedule making device makes a judgment as to whether a batch carrying-out procedure can complete the transport earlier than a sequential carrying-out procedure or not, and selectively employs these procedures in accordance with a result of the judgment. The sequential carrying-out procedure is a procedure in which substrates are transported to a predetermined transport destination in chronological order of the times at which the transport process can start, and the batch carrying-out procedure is a procedure in which a substrate the transport process of which can start is not transported until a time at which the transport process of a succeeding substrate can start, and the substrates are transported together to a transport destination at the time when the transport process of the succeeding substrate can start.
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