Method and system for iterative defect classification

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United States of America Patent

PATENT NO 9922269
SERIAL NO

15010887

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Abstract

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Defect classification includes acquiring one or more images of a specimen including multiple defects, grouping the defects into groups of defect types based on the attributes of the defects, receiving a signal from a user interface device indicative of a first manual classification of a selected number of defects from the groups, generating a classifier based on the first manual classification and the attributes of the defects, classifying, with the classifier, one or more defects not manually classified by the manual classification, identifying the defects classified by the classifier having the lowest confidence level, receiving a signal from the user interface device indicative of an additional manual classification of the defects having the lowest confidence level, determining whether the additional manual classification identifies one or more additional defect types not identified in the first manual classification, and iterating the procedure until no new defect types are found.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baris, Oksen San Francisco, US 3 7
He, Li San Jose, US 118 2679
Jordan,, III John R Mountain View, US 3 4
Sinha, Harsh Santa Clara, US 6 3
Venkataraman, Sankar Milpitas, US 14 39

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