Apparatus for treating substrate
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United States of America Patent
Stats
-
Mar 20, 2018
Grant Date -
Dec 31, 2015
app pub date -
Jun 19, 2015
filing date -
Jun 30, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Disclosed is a substrate treating apparatus which includes a treating container having a treating space therein and including a plurality of collecting vessels surrounding the treating space and provided such that inlets for inputting a fluid in the treating space are vertically stacked on each other, a support unit supporting a substrate in the treating space, a solution supply unit supplying a treating solution to the substrate supported by the support unit, and elevation units respectively joined with the collecting vessels and lifting up and down the collecting vessels. Each of the elevation units includes a base having a ring shape and joined with a corresponding collecting vessel, an elevation load joined with the base, and a driver lifting up and down the elevation load.
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