Susceptor having a hollow in its wall facing the orientation flat of a semiconductor wafer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9922863
SERIAL NO

14444464

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A susceptor for securing a semiconductor wafer with an orientation flat within a pocket of the susceptor is disclosed. The pocket provides a first inner wall extending along the orientation flat and a second wall facing an arched periphery of the semiconductor wafer. The first inner wall provides a hollow extending outwardly from the first inner wall. The hollow can have a step, a slope, or a chamfered corner.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • SUMITOMO ELECTRIC INDUSTRIES, LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horino, Kazuhiko Yokohama, JP 11 609

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 20, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 20, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00