Group III nitride composite substrate and method for manufacturing the same, laminated group III nitride composite substrate, and group III nitride semiconductor device and method for manufacturing the same

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United States of America Patent

PATENT NO 9923063
SERIAL NO

14767706

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Abstract

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A group III nitride composite substrate with a diameter of 75 mm or more includes a support substrate and a group III nitride film with a thickness of 50 nm or more and less than 10 μm that are bonded to each other. A ratio st/mt of a standard deviation st of the thickness of the group III nitride film to a mean value mt of the thickness thereof is 0.01 or more and 0.5 or less, and a ratio so/mo of a standard deviation so of an absolute value of an off angle between a main surface of the group III nitride film and a plane of a predetermined plane orientation to a mean value mo of the absolute value of the off angle is 0.005 or more and 0.6 or less.

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Patent Owner(s)

  • SUMITOMO ELECTRIC INDUSTRIES, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishibashi, Keiji Itami, JP 124 1970
Seki, Yuki Itami, JP 13 55
Uematsu, Koji Itami, JP 84 2010
Yamamoto, Yoshiyuki Itami, JP 122 1424
Yanagisawa, Takuya Itami, JP 10 25

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