Acoustic wave device and method for manufacturing the same
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United States of America Patent
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Mar 20, 2018
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N/A
app pub date -
Feb 24, 2015
filing date -
Mar 5, 2014
priority date (Note) -
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Abstract
An acoustic wave device includes: a piezoelectric substrate; an interdigital electrode that is provided on the piezoelectric substrate and made of a laminated film, an electric resistivity of a material of an uppermost layer in the laminated film being larger than that of a material of a just-under layer located one layer lower than the uppermost layer; and a pad electrode that is provided on the piezoelectric substrate and electrically connected to the interdigital electrode, and has a same film structure as a film structure from a layer on the piezoelectric substrate to the just-under layer in the laminated film of the interdigital electrode, an upper surface of a layer corresponding to the just-under layer being exposed.
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