Graphene wiring structure and method for manufacturing graphene wiring structure

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United States of America Patent

PATENT NO 9924593
SERIAL NO

15254353

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Abstract

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A graphene wiring structure of an embodiment has a substrate, a metal part on the substrate, multilayered graphene connected to the metal part, a first insulative film on the substrate, and a second insulative film on the substrate. The metal part is present between the first insulative film and the second insulative film. Edges of the multilayered graphene are connected to the metal part. A side face of the first insulative film vertical to the substrate opposes a side face of the second insulative film vertical to the substrate. A first outer face of the multilayered graphene is in physical contact with a first side face of the first insulative film vertical to the substrate. A second outer face of the multilayered graphene is in physical contact with a second side face of the second insulative film vertical to the substrate.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishikura, Taishi Kuwana, JP 11 31
Kajita, Akihiro Yokkaichi, JP 78 827
Katagiri, Masayuki Kawasaki, JP 106 1995
Miyazaki, Hisao Yokohama, JP 36 71
Sakai, Tadashi Yokohama, JP 166 1964
Yamazaki, Yuichi Inagi, JP 76 882

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