Workpiece processing chamber having a rotary microwave plasma antenna with slotted spiral waveguide

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United States of America Patent

PATENT NO 9928993
SERIAL NO

14609883

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Abstract

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A microwave antenna includes a first spiral conduit having a first conduit end, first plural ports in a floor of the first spiral conduit spaced apart along the length of the first spiral conduit; an axial conduit coupled to a rotatable stage; and a distributor waveguide comprising an input coupled to the axial conduit and a first output coupled to the first conduit end.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Stowell, Michael W Loveland, US 130 1176

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