Probe card and having opposite surfaces with different directions and test apparatus including probe card thereof

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United States of America Patent

PATENT NO 9933478
SERIAL NO

15060856

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A probe card includes a probe; and a probe card substrate which includes a first member and a second member, the first member having a first surface provided with the probe and the second member having a second surface surrounding the first surface, wherein a direction of the first surface is different from a direction of the second surface.

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Patent Owner(s)

Patent OwnerAddress
TOSHIBA MEMORY CORPORATION1-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 105-8001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ego, Michiko Saitama, JP 1 0
Fujiwara, Tomoko Kanagawa, JP 56 1849
Kaneda, Keiko Chiba, JP 7 0
Sueyama, Takao Kanagawa, JP 8 1

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