B2F4 manufacturing process

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United States of America Patent

PATENT NO 9938156
SERIAL NO

14350543

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Abstract

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A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates. In another specific aspect, a reactor system and methods are provided for manufacture of boron precursors such as B2F4.

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Patent Owner(s)

Patent OwnerAddress
MORGAN STANLEY SENIOR FUNDING INC1300 THAMES STREET 4TH FLOOR BALTIMORE MD 21231

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Byl, Oleg Southbury, US 50 326
Jones, Edward E Woodbury, US 30 212
Pydi, Chiranjeevi Danbury, US 8 45
Sweeney, Joseph D New Milford, US 83 783

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