Physical quantity detection element, physical quantity detection device, electronic apparatus, and moving object
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United States of America Patent
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Apr 10, 2018
Issued Date -
N/A
app pub date -
Oct 2, 2014
filing date -
Oct 3, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.
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