Head-integrated atomic force microscope and composite microscope including same

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United States of America Patent

PATENT NO 9939461
SERIAL NO

15323078

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Abstract

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An object of the application is to provide a head-integrated for an atomic force microscope capable of realizing minimization of a weight and a volume and improvement of structural stability by optimizing a head structure of the atomic force microscope. Another object of the application is to provide a head-integrated atomic force microscope capable of being utilized for imaging a large-area sample by enabling high-rate head scan due to dynamic characteristics improved by mounting the integrated-head described above. Still another object of the application is to provide a composite microscope including a head-integrated atomic force microscope, capable of performing high-rate position search and imaging and performing precise observation of a three-dimensional shape up to an atomic image level in a region of interest by combining the head-integrated atomic force microscope having the improved dynamic characteristics as described above and an electron microscope or an optical microscope with each other.

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Patent Owner(s)

Patent OwnerAddress
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCEDAEJEON

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Dal Hyun Daejeon, KR 9 24
Park, Byong Chon Daejeon, KR 5 9
Shin, Chae Ho Daejon, KR 2 2

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