Fluid supplying apparatus and system and method for cleaning thin film using the same
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United States of America Patent
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Apr 17, 2018
Issued Date -
N/A
app pub date -
Feb 15, 2013
filing date -
Aug 19, 2010
priority date (Note) -
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Abstract
A fluid supplying apparatus includes an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit, and an outer tube arranged coaxially or non-coaxially with the inner tube to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside. The outer tube substantially has the same length as the inner tube. The fluid supplying apparatus may be used for a thin film cleaning system or method.
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