Dielectric material and electrostatic chucking device

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United States of America Patent

PATENT NO 9944561
SERIAL NO

15120150

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A dielectric material includes a composite sintered body in which conductive particles are dispersed in an insulating material, in which a dielectric constant at a frequency of 40 Hz is 10 or higher, and a difference between a maximum dielectric loss value and a minimum dielectric loss value at a frequency of 1 MHz in a surface of the composite sintered body is 0.002 or less.

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Patent Owner(s)

  • SUMITOMO OSAKA CEMENT CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishizuka, Masayuki Tokyo, JP 61 165
Nagatomo, Hiroaki Tokyo, JP 14 80

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