Ionization vacuum measuring cell

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United States of America Patent

PATENT NO 9945749
SERIAL NO

14773250

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Abstract

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An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).

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Patent Owner(s)

  • INFICON GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andreaus, Bernhard Rapperswil, CH 7 15
Enderes, Rolf Malans, CH 4 22
Stocker, Rudolf Wattwil, CH 10 156
Untermarzoner, Oskar Ruggeli, LI 2 34
Wuest, Martin Malans, CH 11 91

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