Microelectromechanical systems (MEMS) scanners for scanning laser devices

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United States of America Patent

PATENT NO 9946062
SERIAL NO

15370429

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The embodiments described herein provide microelectromechanical system (MEMS) scanners with increased resistance to distortion in the mirror surface. Such MEMS scanners, when incorporated into laser scanning devices, are used to reflect laser light into a pattern of scan lines. Thus, by reducing distortion in the scanning surface these MEMS scanners can provide improved performance in scanning laser devices, including scanning laser projectors and laser depth scanners. In general, this is accomplished by providing a MEMS scanner where the connection to the scan plate is made at an intermediate support structure, and at a point on that intermediate support structure that is offset from the scanning surface. Providing the connection to the scan plate at points offset from the scanning surface can reduce the distortion that occurs in the scanning surface as a result of rotational forces in the MEMS scanner.

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Patent Owner(s)

Patent OwnerAddress
MICROVISION INC6244 185TH AVE NE REDMOND WA 98052

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Dean R Lynwood, US 51 548
Davis, Wyatt O Bothell, US 33 300
Haynie, Quinn William Redmond, US 2 0
Helsel, Mark P Seattle, US 25 805
Saracco, Matthieu Redmond, US 19 120
Tauscher, Jason B Sammamish, US 17 126

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