Pre space transformer, space transformer manufactured using the pre space transformer, and semiconductor device inspecting apparatus including the space transformer

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United States of America Patent

PATENT NO 9947457
SERIAL NO

15443653

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Abstract

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Disclosed herein is a pre space transformer including: a substrate having a first surface and a second surface, which is an opposite surface to the first surface; individual electrodes disposed on the first surface; and common electrodes disposed in the substrate, wherein the individual electrodes are repeatedly disposed while configuring a unit pattern.

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Patent Owner(s)

Patent OwnerAddress
SEMCNS CO LTD1F 35 PANGYO-RO 255BEON-GIL BUNDANG-GU SEONGNAM-SI GYEONGGI-DO 13486

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Yoon Hyuck Suwon-si, KR 18 55
Kim, Ki Young Suwon-si, KR 268 3442
Oh, Kwang Jae Suwon-si, KR 14 97

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