Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control
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United States of America Patent
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Apr 17, 2018
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N/A
app pub date -
Jul 30, 2015
filing date -
Apr 26, 2011
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Abstract
A coating treatment apparatus supplying a coating solution to a front surface of a rotated substrate and diffusing the supplied coating solution to an outer periphery side of the substrate to thereby apply the coating solution on the front surface of the substrate includes: a substrate holding part holding a substrate; a rotation part rotating the substrate held on the substrate holding part; a supply part supplying a coating solution to a front surface of the substrate held on the substrate holding part; and an airflow control plate provided at a predetermined position above the substrate held on the substrate holding part for locally changing an airflow above the substrate rotated by the rotation part at an arbitrary position.
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