Processing apparatus, nozzle, and dicing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9947571
SERIAL NO

14928747

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A processing apparatus of an embodiment includes a stage that can have a sample placed thereon, a rotation mechanism that rotates the stage, a nozzle that injects a substance onto the sample, a movement mechanism that moves the stage and the nozzle in a relative manner in a direction perpendicular to the rotation axis of the stage; and a control unit that controls the movement mechanism.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBAKAWASAKI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takano, Masamune Kanazawa Ishikawa, JP 8 29

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 17, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00