Vacuum container of laser oscillator
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United States of America Patent
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Apr 17, 2018
Issued Date -
N/A
app pub date -
Aug 5, 2016
filing date -
Aug 12, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A vacuum container of a laser oscillator includes a first sealing member and a second sealing member that are disposed between a tube and an insertion member. The first sealing member is made of a material having a corrosion resistance higher than the second sealing member, the first sealing member is disposed on a vacuum side relative to the second sealing member, the second sealing member is made of a material having a sealing property higher than the first sealing member, and the first sealing member at least partially includes a deformation portion that deforms in such a manner as to enhance a sealing property thereof.
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