Method and technique to control MEMS DVC control waveform for lifetime enhancement

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United States of America Patent

PATENT NO 9948212
SERIAL NO

14889118

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Abstract

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The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of the MEMS device towards the contact surface is reduced and thus, the impact velocity is reduced and less damage of the MEMS DVC device occurs.

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Patent Owner(s)

  • CAVENDISH KINETICS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huffman, James Douglas McKinney, US 6 28
Joshi, Vikram Mountain View, US 87 3221
Khieu, Cong Quoc San Jose, US 6 98
Knipe, Richard L McKinney, US 55 1539
Van, Kampen Robertus Petrus S-Hertogenbosch, NL 40 264

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