Apparatus for three dimensional integrated circuit testing

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United States of America Patent

PATENT NO 9952279
SERIAL NO

13724004

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Abstract

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A three-dimensional integrated circuit testing apparatus comprises a probe card configured to couple a device-under-test of a three-dimensional integrated circuit with an automatic testing equipment board having a plurality of testing modules, wherein the probe card comprises a plurality of known good dies of the three-dimensional integrated circuit, a plurality of interconnects of the three-dimensional integrated circuit and a plurality of probe contacts, wherein the probe contacts are configured to couple the probe card with testing contacts of the device-under-test of the three-dimensional integrated circuit.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDSCIENCE-BASED INDUSTRIAL PARK 121 PARK AVE 3 HSIN-CHU R O C

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Ching-Fang Taichung, TW 34 106
Chen, Hao Luzhou, TW 1012 6150
Chung, Meng-Lin Taipei, TW 6 45
Hsieh, Wen-Wen New Taipei, TW 5 7
Huang, Chung-Han New Taipei, TW 7 29
Lin, Hung-Chih Hsin-Chu, TW 117 1212
Peng, Ching-Nen Hsin-Chu, TW 50 416
Wang, Mill-Jer Hsin-Chu, TW 85 602
Yuan, Chung-Sheng Hsin-Chu, TW 13 72

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