Protective film-forming film, sheet for forming protective film, complex sheet for forming protective film, and method of producing manufactured product

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United States of America Patent

PATENT NO 9953856
SERIAL NO

15113561

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is protective film-forming sheet (2) including: a protective film-forming film (1) having a light transmittance at a wavelength of 1064 nm of 55% or greater and a light transmittance at a wavelength of 550 nm of 20% or less; and a release sheet (21) which is laminated on one or both faces of the protective film-forming film (1). According to this protective film-forming sheet (2), it is possible to form a protective film which allows a workpiece such as a semiconductor wafer to have a modified layer disposed in advance therein by a laser so that the workpiece can be split through the application of force thereon, while preventing grinding marks on the workpiece or a product formed therefrom from being visible to the naked eye.

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Patent Owner(s)

Patent OwnerAddress
LINTEC CORPORATION23-23 HONCHO ITABASHI-KU TOKYO 173-0001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamamoto, Daisuke Warabi, JP 196 1216
Yoneyama, Hiroyuki Nagareyama, JP 177 1018

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