Flow control system, method, and apparatus

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United States of America Patent

PATENT NO 9958302
SERIAL NO

15087130

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Importance

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Abstract

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In one embodiment, a control apparatus for delivery of a process gas includes an inlet conduit; a valve operably coupled to the inlet conduit and alterable between an open condition and a closed condition, the valve having a first conductance and being downstream of the inlet conduit; a characterized restrictor operably coupled to the valve, the characterized restrictor having a second conductance and being downstream of the valve; and an outlet conduit operably coupled to the characterized restrictor and being downstream of the characterized restrictor; wherein a ratio of the first conductance to the second conductance is 10:1 or higher.

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Patent Owner(s)

Patent OwnerAddress
ICHOR SYSTEMS INC3185 LAURELVIEW CT FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mudd, Daniel T Reno, US 36 848
Mudd, Patti J Reno, US 17 184

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