Pressure sensor

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United States of America Patent

PATENT NO 9958349
SERIAL NO

15085592

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.

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Patent Owner(s)

  • INVENSENSE, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hummel, Rene Baar, CH 14 103
Kraehenbuehl, Thomas Zurich, CH 3 11
Lin, Chia Min Hsinchu County, TW 5 42
Lin, Chung-Hsien Hsinchu, TW 82 1311
Reinhard, Andreas Dubendorf, CH 29 241
Schumm, Johannes Zurich, CH 4 48
Su, Wang Shen Tainan, TW 6 43
Tang, Tsung Lin Kaohsiung, TW 11 43
Thiele, Stefan Jona, CH 15 68

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