Optical Processing head, optical processing apparatus, and control method and control program of optical processing apparatus

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United States of America Patent

PATENT NO 9959613
APP PUB NO 20170186143A1
SERIAL NO

14889361

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Abstract

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This specification discloses an optical processing head including a light guide portion that guides, to a process surface, a ray for processing. The light guide portion is further configured to guide, to the process surface, a ray for inspection different in wavelength from the ray for processing. The optical processing head further includes an inspection portion that inspects the state of the process surface based on reflected light of the ray for inspection reflected by the process surface. With the optical processing head, the state of the process surface can be easily inspected even during optical processing.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBAMINATO-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Masukawa, Kazuyuki Yokohama, JP 23 76
Obara, Takashi Yokohama, JP 73 696
Ohno, Hiroshi Yokohama, JP 278 2274
Sasaki, Mitsuo Yokohama, JP 127 1266
Sasaki, Yuji Yokohama, JP 152 1085

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